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      Flat Panel Display (FPD) Lithography Equipment
      MPAsp-E813
      FPD Lithography Equipment for Generation 6 Plates, Size 1,500 mm x 1,850 mm

      • Features
      • Specifications

      Basic Information

      Model Name: MPAsp-E813

      Features

      High-definition panel production on Generation 6 glass plates

      Smartphones, smartwatches and AR/VR displays increasingly demand higher definition displays.
      MPAsp-E813 FPD Lithography Systems have helped manufacturers realize the production of high-definition plates with Generation 6 glass plates (1500 mm x 1850 mm) and have become indispensable for Liquid Crystal Display (LCD) and Organic Light Emitting Display (OLED) panel production.

      World's highest panel process resolution

      MPAsp-E813H FPD systems achieve the *world's highest panel process resolution of 1.5 µm for Line & Space patterns (L/S) and 2.0 µm for Contact Holes (CH) by adopting a new mirror optical system design and illumination system.

      • *Among equivalent class of FPD Lithography Equipment (Examination by Canon).

      As a result, it is possible to produce high-definition panels that exceed 800ppi (pixel per inch).

      Overlay accuracy improvement

      MPAsp Series FPD equipment enjoy improved overlay accuracy due to a new magnification correction mechanism and temperature control system. When compared to previous FPD Lithography Equipment MPAsp series FPD systems provide higher overlay accuracy, at a higher speed thanks to the new alignment system.

      High productivity & high utilization rate

      MPAsp Series FPD systems feature wide-field exposure and are capable of producing high-definition display panels efficiently using a one-shot exposure method without stitching.
      Further cycle time reduction options are also available to improve productivity and Canon is constantly striving to deliver additional improvements.

      MPAsp Series FPD systems also boast a high stability and utilization rates thanks in part to stage precision improvements and increases in body rigidity.

      Designed for ultra-thin glass plates

      Mobile products such as smartphones are required to be lightweight and thin and subsequently, glass plates required for displays must also be thinner. MPAsp-E813 Series FPD systems feature improved glass plate handling technology that makes exposure of a glass plates with a thickness of 0.3 mm a reality.

      Specifications

      MPAsp-E813H

      Resolution
      1.5 µm (L/S)
      Overlay Accuracy
      ± 0.3 µm
      Projection Optical System
      Reflection Projection Optical System (no magnification)
      Reduction Ratio
      1:1
      Plate Size
      1,500 mm x 1,850 mm
      Main Body Dimensions
      (W) 8,000 x (D) 9,900 x (H) 5,700 mm
      *Tact Time
      **46 sec

      MPAsp-E813T

      Resolution
      2.0 µm (L/S)
      Overlay Accuracy
      ± 0.35 µm
      Projection Optical System
      Reflection Projection Optical System (no magnification)
      Reduction Ratio
      1:1
      Plate Size
      1,500 mm x 1,850 mm
      Main Body Dimensions
      (W) 8,000 x (D) 9,900 x (H) 5,700 mm
      *Tact Time
      **46 sec

      MPAsp-E813P

      Resolution
      3.0 µm (L/S)
      Overlay Accuracy
      ± 0.5 µm
      Projection Optical System
      Reflection Projection Optical System (no magnification)
      Reduction Ratio
      1:1
      Plate Size
      1,500 mm x 1,850 mm
      Main Body Dimensions
      (W) 8,000 x (D) 9,900 x (H) 5,700 mm
      *Tact Time
      ***53 sec
      • *2 x 2 shots, 30 mJ/cm2
      • **Hybrid mode, Option required
      • ***FDC mode
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